<%@LANGUAGE="JAVASCRIPT" CODEPAGE="65001"%> 無題ドキュメント

The InGrid technology is one example of post-processing performed in the
Mesa+ cleanroom of the University of Twente. With this technology we,
Mes+, can construct Micromegas type gaseous detectors on top of various
substrates, most interestingly on fully processed CMOS chips or wafers, without harming or changing the substrates in any way. We use micro-technology processing steps that allow to precisely align the detector elements with the read-out plane.

Most results have been obtained by combining the InGrid detectors with Timepix substrates that are used for read-out of the multiplied charge.
With this method we can build very high resolution single electron detectors with a high rate capability. By adding a photocathode we can make the structure light sensitive. Our most recent experiments were to combine the detectors with CsI reflective photocathodes evaporated onto the detector grid surface. These detectors can image UV photons with a high resolution and a high sensitivity.

In the talk I will introduce the technology, the different types of devices we can make and the results we have obtained. I will also discuss the possibilities for future devices and applications and the current limits of our technology.