SOI

SOI Pixel Detector R&D

Last update Jan. 29, 2010

 

MX1378

2010.1 MX1378 MPW run.

 

We are developing monolithic pixel radiation sensor/electronics using a SOI (Silicon-On-Insulator) Technology.

* FY09 KEK-OKI SOI Pixel Multi Project Wafer (MPW) run.

--> See Detail

* Documents etc.

* Published Papers

* SOI Meeting Agenda and Documents (-> KEK Indico system)

* Internal Document (access restricted)

* Collaboration member

*Past Figure, Photo etc.

* Links

 

SOI Pixel Cross Section

Pixel Detector based on Wafer Bonding Silicon-On-Insulator Technology (Charged Particle, X-ray)

Contact: Yasuo Arai